Physical equipment: Electron Microprobe JXA-733 JEOL

Electron Microprobe JXA-733 JEOL

Description:
The JXA-733 electron probe is a high performance X-ray micro analyser for qualitative and quantitative analysis of a variety of specimens and their composing elements.
Capable of handling up to five spectrometers and also a high resolution scanning electron microscope makes this micro analyser an indispensable instrument in fields of research and industrial engineering. This fine focused electron probe irradiates the specimen, generating X-rays, secondary electrons and back-scattered electrons used for analysis. X-rays irradiated from the surface of the specimen are analysed on one hand according to their energy and on the other hand according to their wavelength. The specimen can be viewed under direct illumination through an optical microscope installed on the column. Secondary and back-scattered electron images, both composition and topographic, can be seen on the main control panel CRT and photographed using the camera for scanning images.

Technical details:
Microprobe
Guaranteed resolution 0.70 nm
Accelerating voltage 1 - 50 kV in 1 kV steps
Probe current range 10^-12A - 10^-5A
Probe current stability ą0.2 %/h @ 25 kV, 50nA
Analysable elements 5 B - 92 U
Thermionic electron gun, tungsten hairpin filament
Specimen stage
Shift range X-axis 0 - 32 mm
Y-axis 0 - 50 mm
Z-axis 10 - 32 mm
Tilt 0° - 60° eucentric
Rotation 360° endless
WD 11 mm - 31 mm
Size specimen 32 mm diameter x 25 mm height
EDS X-ray spectrometer
Be-window 10 mm diameter
Resolution FWHM 141 eV
WDS X-ray spectrometers
Take-off angle 40°
Rowland circle radius 140 mm
Spectrometer scanning range L = 60 - 254 mm
2theta = 25° - 130°
Analysing crystals and detectors 1^st channel spectrometer: TAP, STE, gas flow proportional counter
2^nd channel spectrometer: LiF, PET , Xe-filled proportional counter
Electron detectors
Secondary electron detector SEI
Back-scattered electron detector BEI
Probe current detector PCD (beam)
Absorbed electron ampere meter AEM (specimen)

Room: 00.01

More Technical information: Techinfo@mtm.kuleuven.ac.be


Technical details:
Microprobe
	Guaranteed resolution		0.70 nm
	Accelerating voltage		1 - 50 kV in 1 kV steps
	Probe current range		10^-12A - 10^-5A
	Probe current stability		ą0.2 %/h @ 25 kV, 50nA
	Analysable elements		5 B - 92 U
	Thermionic electron gun, tungsten hairpin filament
	Specimen stage
		Shift range	X-axis 0 - 32 mm Y-axis 0 - 50 mm Z-axis 10 - 32 mm
		Tilt	0° - 60° eucentric
		Rotation	360° endless
		WD	11 mm - 31 mm
		Size specimen	32 mm diameter x 25 mm height
EDS X-ray spectrometer
	Be-window		10 mm diameter
	Resolution FWHM		141 eV
WDS X-ray spectrometers
	Take-off angle		40°
	Rowland circle radius		140 mm
	Spectrometer scanning range		L = 60 - 254 mm 2theta = 25° - 130°
	Analysing crystals and detectors		1^st channel spectrometer: TAP, STE, gas flow proportional counter 2^nd channel spectrometer: LiF, PET , Xe-filled proportional counter
Electron detectors
	Secondary electron detector		SEI
	Back-scattered electron detector		BEI
	Probe current detector		PCD (beam)
	Absorbed electron ampere meter		AEM (specimen)